This webinar introduces the concepts of thin-film piezoelectric MEMS and demonstrates how they can be applied in sensors and actuators.

Thin-film piezoelectric microelectromechanical systems (piezoMEMS) enable the fabrication of compact, energy-efficient sensors and actuators. By applying a voltage across a micrometer-thin piezoelectric layer, precise micromechanical motions are generated, allowing devices to operate with exceptionally high energy densities. This makes piezoMEMS ideal for demanding applications—from precision instruments to everyday consumer electronics. Since their first commercial use in film bulk acoustic resonators (FBARs) and inkjet printers, thin-film piezoMEMS have expanded into a wide range of applications from sea to space.

In this webinar, Dr. Runar Dahl-Hansen from SINTEF's Micro and Nanotechnology Lab will introduce thin film piezoMEMS technology, its integration with advanced miniaturized sensors and actuators, and how devices are made using SINTEF's in-house piezoMEMS processing line.

This webinar is suitable for engineers/researchers or PhD students in microelectronics wanting to learn about thin-film piezoelectric MEMS. The webinar is free to attend and only simple sign-up is required.