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SEMulator3D Virtual Fabrication Bundle

All SEMulator3D users will be upgraded to SEMulator Virtual Fabrication Bundle free of charge. SEMulator3D Virtual Fabrication Bundle includes:

• SEMulator3D Basic
  Package containing everything necessary to simulate and view complex CMOS process flows using the voxel modeling engine. Voxel modeling is extremely efficient and ideal for modeling unit process steps that can be characterized geometrically; for example, lithography, spin-on deposition, and wet etches.
• SEMulator3D Advanced Modeling
  Provides accurate physics-driven process models for advanced technologies. A powerful, predictive modeling tool to build process understanding, mitigate technology risk and eliminate cycles of learning in technology development. With minimal input parameters that are easy to calibrate, process engineers can gain significant understanding of the behavior and variability of etch and epitaxy steps and their ramifications in the context of the full technology flow.
• SEMulator3D Automation
  Automate large number of experiments and use metrology to measure critical geometry. Structure search inspects entire build area for design/process violations.

Coventor's Platforms

Coventor's platforms help address the challenges of advanced semiconductor fabrication and micro-electromechanical systems (MEMS) design automation.

CoventorMP

The CoventorMP platform provides a unified environment for MEMS design, starting from fully parametic deign entry to the production of functional models that can be simulated at all levels of abstraction. Comprises MEMS+ and CoventorWare with MEMS extended analyses.

SEMulator3D Virtual Fabrication Bundle

Starting from input design data, SEMulator3D Virtual Fabrication Bundle follows an integrated process flow description to create the virtual equivalent of the complex 3D structures created in the fab. Comprises SEMulator3D Basic, SEMulator3D Advanced Modeling and SEMulator3D Automation.

MEMS+

MEMS+ provides a standard methodology for MEMS+IC design. Interfacing to the Cadence Virtuoso and the MathWorks MATLAB and Simulink environments, it provides a common platform and efficient methodology for MEMS and IC designers, bridging the gap between the accuracy required by MEMS designers and the simulation speed required by ASIC designers It enables MEMS designers to explore device concepts and optimize designs much faster than using conventional field solvers.

Users select parametric elements from the library to assemble their design and simulate their designs in a built-in simulator, MathWorks MATLAB and Simulink, or Cadence Virtuoso. After simulating, users visualize and animate the simulation results in 3D.

The Advanced Sensor Modeling package is also included which enables the export simplified models in Verilog-A or MROM format. These models can then be analysed in simulators such as Virtuoso/Spectre or MATLAB/Simulink. Also included in this package is the ability to import Finite Element models into MEMS+.

MEMS+ includes:

• MEMS Component Library
  An extensive library of MEMS components.
• 3D MEMS Design Entry (Innovator)
  Intuitive, 3D user interface that makes design entry easy and fast.
• Scene3D
  MEMS Simulation result animation.
• MEMS+ for MathWorks
  MEMS design in MathWorks MATLAB and Simulink, from concept to system simulation.
• MEMS+ for Cadence
  MEMS design and co-simulation in Cadence Virtuoso.

MEMS+ is based on a unique MEMS-specific library of high-order, parametric finite elements. These elements provide the accuracy and generality of finite-element analysis (FEA) yet runs extremely fast compared to conventional FEA. Designers can simulate their entire MEMS device, including gas damping effects and control circuitry. With MEMS+, designers can run time-dependent and closed-loop simulations that reveal dynamic behavior that here-to-fore could only be observed and quantified through time-consuming measurements on prototypes.

The parametric nature and speed advantages of MEMS+ models enable users to solve problems that traditional approaches cannot address. With MEMS+, designers can investigate sensitivity to manufacturing variables and study complex effects like cross coupling between mechanical degrees of freedom, quadrature, electrostatic spring softening, thermo-elastic noise, levitation, and substrate deformation.

With MEMS+ you can:

• Rapidly explore design concepts versus performance specifications such as sensitivity, linearity, frequency response, or actuation time.
• Predict performance sensitivity to design and manufacturing variables.
• Optimize designs for performance, temperature insensitivity, manufacturability, and yield.
• Perform transient simulations of MEMS actuators with fully coupled electro-mechanics and squeezed-film damping effects.
• Simulate closed-loop behavior of sensors and resonators in Simulink.
• Simulate MEMS and electronics (ICs) together in the Cadence Virtuoso environment.
• Predict signal-to noise ratio for MEMS microphones.
• Include package and substrate deformation effects on MEMS device performance.
• Selectively exclude non-linear electro-mechanical effects to optimize simulation speed.
• View 3D animations of mode shapes, time-harmonic behavior, and transient analyses.

Coventor's MEMS+ design platform accelerates the development of complex 3D systems with state-of-the-art actuators, accelerometers and gyroscopes, microphones and other types of MEMS devices.

SEMulator3D

Base Version

SEMulator3D is a powerful 3D semiconductor and MEMS process modeling platform that offers wide ranging technology development capabilities. Based on highly efficient physics-driven voxel modeling technology, SEMulator3D has a unique ability to model complete process flows.

Using unique physics-driven 3D modeling technology, the SEMulator3D modeling engine can model a wide variety of unit process steps. Each process step requires only a few geometric and physical input parameters that are easy to understand and calibrate. Just as in an actual fab, upstream unit process parameters (such as deposition conformality, etch anisotropy, selectivity, etc.) interact with each other and design data in a complex way to impact the final device structure.

SEMulator3D Viewer shows a 3D rendering of the virtual device model at every step in the process. Step-by-step visualization can aid in understanding process failure modes and other complex process phenomena. Cross-sectioning and dimensional measurements can be performed anywhere on the 3D model. SEMulator3D Viewer has many advanced capabilities, including automatic animation of process steps and automatic export to Microsoft PowerPoint.

CMOS -MEMS cross section view.

Coventor Classroom Teaching Licenses

The Microelectronics Support Centre at RAL is pleased to offer Coventor Classroom Teaching Licenses to EUROPRACTICE members.

EUROPRACTICE Coventor Classroom Teaching licenses are intended for institutes to do mass class teaching of their students, in cases where they have too few regular EUROPRACTICE non-commercial research and training license seats for that purpose. The Classroom Teaching licenses will be subject to all the usage restrictions of the regular EUROPRACTICE Coventor licenses.

• CoventorMP
• SEMulator3D Virtual Fabrication Bundle

Teaching licenses comprise 20 full licenses for a 6 month duration within a 12 month window and are free of charge but subject to approval by Coventor. To be eligible for teaching licenses, a university must pay an annual charge for a purchased license for that product. As part of the ordering procedure, universities must supply a syllabus for the proposed training course.

The Coventor Classroom Teaching Licenses prices and order forms can be accessed via the EUROPRACTICE Members Only webpages.

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