EUROPRACTICE Logo SoftMEMS Search
Join the EUROPRACTICE Mailing List

Home > Software > SoftMEMS

Quick links:

PC Based MEMS Pro UNIX Based MEMS XPLORER CS How to Order
PC Based MEMS Master MEMS Manufacturing Solutions


Evaluation Licenses

SoftMEMS are offering Europractice members a free 30-day evaluation license of their PC MEMS Pro and Unix Xplorer products. If you wish to take advantage of this offer, please contact the Microelectronics Support Centre at RAL.
Email:   MicroelectronicsCentre@stfc.ac.uk



PC Based MEMS Pro

Please note. PC MEMS Pro is a MEMS overlay to the Tanner software tools. MEMS Pro from SoftMEMS does not include the Tanner software, this must be purchased separately (available through the EUROPRACTICE Software Service).

MEMS Pro is a PC-based integrated CAD tool suite for the design of microsystems coupled with electronics. It ensures a seamless design flow from schematic capture to system simulation and to automated or custom layout and verification. MEMS Pro designs are foundry-ready with industry-standard output formats including GDS II, CIF, EDIF and DXF. MEMS Pro is an easy to use product and is the right choice for first-time CAD tool users.

MEMS Pro is based on 2 modules:

Modules Description Tools required
MEMS Pro DS (Design Suite) Complete design environment dedicated to MEMS from schematic simulation to mask layout design - Ensure the link between layout and 3-dimensional model. Tanner L-Edit v15.02
Tanner T-Spice Pro v15.02
ROM Reduced order model generator. ANSYS v9.0 to v13.0

MEMS Pro Features:

- Enable the creation of multi-domain schematics using mechanical, electrical, thermal, optical and fluidic signals.
- Permit simulation of systems containing MEMS and electronic devices with MEMS components represented as equivalent circuits, behavioural models or tables of data.
- Contain MEMS-specific drawing features such as an all-angle mask layout capability, advanced geometry primitives (including arcs and torii) and a cross-section viewer which illustrates the fabrication steps.
- Check design rules including the special needs of MEMS designers for curvilinear geometry and function-specific rules.
- Support MEMS and IC device layout extraction. The multi-domain connectivity is extracted in both schematic and layout allowing a layout vs. schematic (LVS) check.
- Verification environment includes a 3D solid modeler, and direct links to Finite Element and Boundary Element tools such as ANSYS.
- Include a powerful User Programmable Interface for automating, customising and extending MEMS Pro’s command set.
- Technology support for MEMS libraries includes component schematics, behavioral models, and automated parameterised layout generators as well as design rules, extraction rules, technology-layer and process descriptions.
- Support popular fabrication processes. Users may also describe their own technology using the convenient process description editor that supports surface and bulk micromachining steps such as deposit, etch, etc.

ROM Features:

- Generate a behavioral model written in Spice that can be simulated in T-Spice from Tanner reducing a finite element model provided from ANSYS to a few degrees of freedom.
- Handle single or multi physics applications such as mechanical or coupled electro-mechanical structures.



PC Based MEMS Master

Please note. MEMS Master is a MEMS overlay to the SMASH software tools. MEMS Master from SoftMEMS does not include the Dolphin Integration SMASH software, this must be purchased separately (available through the EUROPRACTICE Software Service).

The PC based MEMS Master Series bundle solution is based on 2 main modules:

Modules Description Tools required
MEMS Master Tool for MEMS component design based on behavioral model. Dolphin Integration SMASH v5.6
MEMS Modeler Behavioral model generator. ANSYS v6.0 to v9.0

MEMS Master Features:

MEMS Master is composed of 2 environments (M2Architect and M2Librarian) and a libraries package. This is a tool enabling fast prototyping of MEMS design. It allows the designer to quickly create a design, to simulate it with circuit simulators and view the results. An environment is dedicated to the creation and the management of customised libraries.

- Link the schematic models and the mask layout: it allows an easy capture of the design based on parameterised libraries by maintaining the layout geometry.
- Associated with a process, a layout in standard format is generated, readable in all classical layout editors such as MEMS Pro or MEMS Xplorer…
- Generate a netlist from the design in VHDL_AMS. This netlist is simulated with SMASH, from Dolphin Integration. A results viewer enables results qualification after simulation. Model parameters can then be modified and the MEMS device can again be simulated until fitting with specifications.
- Create and manage models and libraries. It checks all data coherence in the model and libraries such as the coherence between behavioral model, its layout and global information. It also manages the versioning and documentation coherence preventing the re-write on old libraries. It handles behavioral models written in VHDL_AMS models.
- Compile and encapsulate models into libraries usable for M2Architect.
- Libraries available: Loads, Inertial structure (such as anchor, beams and plate) and electrostatic structure (such as combdrives)

MEMS Modeler Features:

- Generate behavioral model written in standard A-HDL language such as VHDL-AMS that can be integrated in SMASH, from Dolphin Integration, for system simulations or in MEMS Master to enrich libraries. The method is based on the reduction of a finite element model provided from ANSYS into few degrees of freedom.
- Handle single or multi physics applications such as mechanical or coupled electro-mechanical structures.
- Reduce a finite element model provided from ANSYS on a single or multi degrees of freedom into a behavioral model. An easy interface facilitates the management of the reduced model.
- Include Linear Combination between reduced models enabling the reduction of simpler finite element model to generate complex behavioral models.

SMASH Features:

SMASH is a multi-level, mixed mode simulator that handles several behavioral languages such as VHDL-AMS. Combined with MEMS Master, it provides you with a complete MEMS solution for prototyping. SMASH is available through the EUROPRACTICE Software Service, for more information, please refer to the EUROPRACTICE Dolphin Integration web page.



UNIX Based MEMS XPLORER CS

MEMS XPLORER CS (MEMS Xplorer Complete Suite) is a customisable MEMS design tool suite for UNIX-based platforms, enabling design teams to develop high-capacity MEMS-based systems that couple devices with electronics. It is a fully integrated, front-end to back-end solution that combines aspects of electronic design automation with mechanical, thermal, optical, electromagnetic and fluidic computer-aided design.

MEMS Xplorer CS complete solution is based on 3 main modules:

Modules Description Tools required
MEMS Xplorer DS (Design Suite) Mask layout editor and system-level simulator for MEMS design integrated on the top of famous IC tools - Ensure the link between mask layout and 3-dimensional model. Cadence v5.14
MEMS Modeler Behavioral model generator. ANSYS v6.0 to v9.0
MEMS Master Tool for MEMS component design based on behavioral model. SpectreS from Cadence v5.14

Note: The IC Cadence framework must be purchased separately. Please refer to the EUROPRACTICE Cadence web pages for information on this software package.

MEMS XPLORER DS:

- Integrates existing third-party design tools including schematic capture, behavioral level simulators, IC layout editors, verification tools and FEM field solvers into a single, common design environment, along with special tools targeted to the needs of MEMS designers.
- Incorporates a library of parameterised standard MEMS components (combdrives, springs, bulk cavities, etc.) with multi-physics schematic and behavioral simulation language descriptions that are linked to automatic device mask layout generators.
- Provides automatic mask layout generators for typical curvilinear functions (hyperbola and parabolic segments, archimedean spirals, etc.) that are fully customisable to foundry processes.
- Makes you benefit from powerful and robust IC tools enhanced with MEMS-oriented verification tools such as all-angle design rule checking, cross-section display, surface and bulk-etching simulation
- Makes the link with FEM tools (ANSYS) via its Solid Modeler, which creates 3D models from device mask layout and a geometrical fabrication process description. It also generates a layout from a 3D model in CIF or GDSII format.
- Can be customised to any process technology, providing design teams a choice of fabrication facilities.

MEMS Modeler:

- Generates behavioral models written in standard A-HDL languages such as Verilog-A and VHDL-AMS that can be integrated in classical IC tools such as Cadence or in MEMS Master to enrich libraries. The method is based on the reduction of ANSYS finite element models into few degrees of freedom.
- Handles single or multi physics applications such as mechanical or coupled electro-mechanical structures.
- Includes linear combination of several reduced models enabling the reduction of simpler finite element models to generate a complex behavioral model.
- Facilitates the management of the reduced model thanks to an easy interface.

MEMS Master Features:

MEMS Master is composed of 2 environments (M2Architect and M2Librarian) and a libraries package. This is a tool enabling fast prototyping of MEMS design. It allows the designer to quickly create a design, to simulate it with circuit simulators and view the results. An environment is dedicated to the creation and the management of customised libraries.

- Link the schematic models and the mask layout: it allows an easy capture of the design based on parameterised libraries by maintaining the layout geometry.
- Associated with a process, a layout in standard format is generated, readable in all classical layout editors such as MEMS Pro or MEMS Xplorer…
- Generate a netlist from the design in Verilog-A or VHDL_AMS. This netlist is simulated with SpectreS of Cadence. A results viewer enables results qualification after simulation. Model parameters can then be modified and the MEMS device can again be simulated until fitting with specifications.
- Create and manage models and libraries. It checks all data coherence in the model and libraries such as the coherence between behavioral model, its layout and global information. It also manages the versioning and documentation coherence preventing the re-write on old libraries. It handles behavioral models written in verilog-A and VHDL_AMS models.
- Compile and encapsulate models into libraries usable for M2Architect.
- Libraries available: Loads, Inertial structure (such as anchor, beams and plate) and electrostatic structure (such as combdrives)



MEMS Manufacturing Solutions

The MEMSCAP design kit allows users to customise the MEMS Xplorer and MEMS Pro engineering platforms for designs targeted at the 3 MUMPs ' technologies:

* PolyMUMPs: surface micro-machining, three levels of polysilicon and one level of metal.
* SoiMUMPs: on SOI wafers, DRIE step to etch the thick epitaxial layer on top of the silicon dioxide. Silicon dioxide is then removed as a sacrificial layer. Anisotropic bulk etch on the substrate back side is possible.
* MetalMUMPs: LIGA UV technology to get metal parts as thick as 30um.Very high aspect ratio achieved.

Please refer to MEMSCAP web site for more details on the MUMPs technologies.

MEMSCAP will also make available a design kit for a large range of foundries on request such as:

* MOSIS
* ADI (Analog Devices)

Design Kit Features:

- Technology specific parameterised component libraries in the form of standard cells described at different abstraction levels (symbolic, behavioural, and parameterised layout).
- Geometric process descriptions, design rules, and extraction rules.
- High-level macros to assist in layout drawing: technology specific object creation, and automation of typical tasks such as release of polysilicon plates.

The EUROPRACTICE IC Service offers MPW runs in the PolyMUMPs, SoiMUMPs and MetalMUMPs processes. For more information please refer to the IMEC web site:


How to Order

Orders are placed with the vendor on a single order, once per month. To be included in the current month's order, all documents including original ink-signed paper End User Agreements (if applicable) must be received by the Microelectronics Support Centre no later than the 25th day of the month.

Detailed instructions on how to place an order are given in our Order Procedures.

MANDATORY DOCUMENTS FOR ALL ORDERS

MANDATORY DOCUMENTS FOR FIRST TIME ORDER FROM THIS VENDOR ONLY

STATEMENT FROM RESEARCH LABORATORIES

PLEASE ENSURE that you read the End User Agreement Notes before downloading the End User Agreements



STFC Home page The EUROPRACTICE Software Service is managed by the Microelectronics Support Centre, STFC Rutherford Appleton Laboratory, UK. You can contact the Microelectronics Support Centre by email: MicroelectronicsCentre@stfc.ac.uk

Last modified: March 28, 2017